Premium Nanofocus and Microfocus Inspection for Electronics
The Phoenix Microme|x Neo and Nanome|x Neo provide high-resolution 2D X-ray technology, Planar|CT and 3D computed tomography (CT) scanning in one system. They are ideally suited for industrial X-ray electronics inspections in process and quality control for greater productivity, failure analysis, quality of your products, and R&D.
With innovative engineering coupled with ultra-high positioning accuracy, Phoenix Microme|x Neo and Nanome|x Neo are ideally suited for industrial X-ray electronics inspections in process and quality control for greater productivity, failure analysis for the increased safety and quality of your products, and R&D where innovations are born. Both enable automated X-ray inspection (AXI) of electronic components - such as semiconductors, PCBs, electronic assemblies, sensors and lithium-ion batteries - in industrial, automotive, aviation and consumer electronics industries.
Non-destructive electronics inspection starts here
Innovative and unique features and an extreme high positioning accuracy make both the Phoenix MicromeIx 160 and 180 neo and the NanomeIx 180 neo the effective and reliable solution for a wide spectrum of 2D and 3D offline inspection tasks: R&D, failure analysis, process and quality control.
The Phoenix|x-ray X|act inspection software offers easy to program CAD based µAXI ensuring automated inspection in the micrometer range. Another unique benefit is Waygate Technologies’ rich options of DXR-HD digital detector fleet. There’s definitely a perfect match of image chain serving your particular application.
Brilliant DXR-HD live imaging
- Large-size DXR S100 Pro detector in combination with superior pixel resolution defines industry leading imaging technology. Provides superior 100 µm pixel resolution and 30 cm x 25 cm large active area combining outstanding detectability with high inspection efficiency
- High dynamic DXR S140 detector with enhanced scintillator technology for precise and fast LIVE inspection. Full frame rate of 25 frames per second at 1536 x 1536 pixels offers low noise coupled with brilliant image quality ensuring fast and detailed live inspection
High output with high-resolution: Diamond|window
Compared to conventional beryllium targets, the Diamond|window allows higher power at a smaller focal spot. This ensures high-resolution
even at high output.
- Up to 2 times faster CT data acquisition at the same high image quality level
- High output with high-resolution
- Non-toxic target
- Improved focal spot position stability within long term measurements
- Increased target lifetime due to less degradation with higher power density
Cutting-edge detail detectability, speed, and image quality
- Brilliant live inspection images with high dynamic Waygate Technologies DXR digital detector array
- Large 27” monitor and ultra-high defect coverage and repeatability
- Detail detectability at 0.5 µm or 0.2 µm with nanofocus
- Live overlay of CAD and inspection results even in rotated oblique inspection views
- High power 180 kV / 20 W microfocus or nanofocus tube for high absorbing electronic samples
Navigation Map Orientation
Clear overview and fast positioning:
- Optical camera image or X-ray overview image for whole sample as navigation map
- Fast manipulation by clicking on the map
- Inspection program can be set based on the optical navigation map
- Position on the map can be saved into test report generated by X|act
Smart Dose Management
- Shadow|target reduces unwanted radiation without frequent generator start & stop
- Fast and stable X-ray recovering. No delay of energy running up
- Realtime visualisation of projected dose through “dose map” overlaid with Navigation map
- Cumulated dose calculation per inspection
- Multi-position dose measurement well integrated into inspection program
- Comparing with manual inspection, up to 99% radiation dose can be saved combining dose control technologies with automated inspection (programming)
Efficient CAD programming
X|act provides not only a minimal setup time compared to conventional view based AXI – once programmed, the inspection program is portable to all X|act compatible systems. The result is fast and easy programming: just assign the inspection strategies and let X|act generate the automated inspection program
- Specific inspection strategies for different pad types
- Fully automated inspection program generation
- Outstanding precision and repeatability - resolutions of only a few micrometers, 360° rotation, and oblique viewing up to 70°
- High reproducibility on large PCBs
- Easy pad identification by its live CAD data overlay function coupled with FLASH!™ image optimisation
- Brilliant live inspection images due to high dynamic Waygate Technologies' DXR digital detector array
- Unique high power 180kV / 20W micro- or nanofocus tube for even high absorbing electronic samples
- Minimised setup time due to highly efficient automated CAD programming
- Xe2 toolkit (X-ray image Evaluation Environment), a graphical based development environment for fast measure setups for evaluating X-ray images)
- Best detail detectability 0.5μm or even 0.2μm with nanofocus
- Best in class image processing technologies optimise digital images quickly and constantly
- Advanced failure analysis with high resolution 3D micro- or nanoCT® or large board Planar|CT
- Optionally 3D CT scans less than 10 seconds
Frost & Sullivan 2023 Award

Download
- Download our comprehensive Industrial & Portable Metrology Catalogue here.